U.S. Code of Federal Regulations
Regulations most recently checked for updates: Mar 25, 2023
Any new source subject to this subpart must achieve the following new source performance standards (NSPS).
Subpart A - Semiconductor NSPS Effluent Limitations
| Pollutant or pollutant property | Maximum for any 1 day | Average of daily values for 30 consecutive days |
|---|---|---|
| Milligrams per liter (mg/l) | ||
| TTO 1 | 1.37 | ( 2) |
| Fluoride (T) | 32.0 | 17.4 |
| pH | ( 2) | ( 3) |
1 Total toxic organics.
2 Not applicable.
3 Within the range of 6.0 to 9.0.
