U.S. Code of Federal Regulations
Regulations most recently checked for updates: Mar 25, 2023
Any new source subject to this subpart must achieve the following new source performance standards (NSPS).
Subpart A - Semiconductor NSPS Effluent Limitations
|Pollutant or pollutant property||Maximum for any 1 day||Average of daily values for 30 consecutive days|
|Milligrams per liter (mg/l)|
|TTO 1||1.37||( 2)|
|pH||( 2)||( 3)|
1 Total toxic organics.
2 Not applicable.
3 Within the range of 6.0 to 9.0.